COMPANY
Product Application
ULTECH PRODUCTS & APPLICATION
- Sputter
- ICP-RIE/RIE, Asher
- ALD/PEALD
- PECVD/CVD
- RTP
- E beam · Thermal evaporator
- Glovebox+PVD
- LPCVD/Furnace
- Belt furnace
- Plasma doping system
- Vacuum sintering/ Brazing
- Wet bench
- Semiconductor
- Display (TSP)
- LED
- Bio & Medical
- New Renewable Energy & Environment
- Nano & Optics
- Electroncs & Eletrical
- Mechanical industrial
- Nano & Mems
- Perovskite solar cell turnkey line
- Si Solar cell turkey line
Semiconductor Production Front and Process
Circuit design
Reticle manufacturing
Oxidation
LPCVD / Furnace · RTP
PR coating
Spray & Spin coater
Exposure
Development
Wet bench
Etching
ICP-RIE · RIE · Wet etcher
PR stripping
Asher · Wet bench · Wet etcher
Ion implantation
Plasma Immersion Ion Implantation
Insulation / Conductive
Film deposition
Film deposition
LPCVD / Furnace · PECVD · PEALD
Metalization
Sputter · Evaporator · RTP