PRODUCT
Thermal Evaporator
EasyDEP-3
SPECIFICATIONS
| Deposition materials | Metal : Ag, Al, Au, Cu, Sn, Ti, Ni,... Oxide : MoO3, NiO, WO3,.. Bio device |
|---|---|
| Substrate size | Max. 8 inch |
| Product yield | 4 wafers/run (@4inch wafer) |
| Substrate rotation | 0 to 20 rpm |
| Substrate holder | [Option] - Heating, Tilting, cooling & rotation |
| No of boats | 1 to 4 ea |
| Thermal power | 1.5 to 3 kw |
| Thickness controller | Single Q’tz crystal sensor & controller |
| Ultimate pressure | < 5.0E-7 Torr (Cryo pump or TMP) |
| Option | Co-evaporation |
| Control | PC control (UPRO software) |
| Dimension (W*D*H) | 900mm X 1,150mm X 1,950mm |