Thermal Evaporator



Deposition materials Metal : Ag, Al, Au, Cu, Sn, Ti, Ni,...
Oxide : MoO3, NiO, WO3,..
Bio device
Substrate size Max. 8 inch
Product yield 4 wafers/run (@4inch wafer)
Substrate rotation 0 to 20 rpm
Substrate holder [Option] - Heating, Tilting, cooling & rotation
No of boats 1 to 4 ea
Thermal power 1.5 to 3 kw
Thickness controller Single Q’tz crystal sensor & controller
Ultimate pressure < 5.0E-7 Torr (Cryo pump or TMP)
Option Co-evaporation
Control PC control (UPRO software)
Dimension (W*D*H) 900mm X 1,150mm X 1,950mm