Thermal Evaporator



Deposition materials Metal : Ag, Al, Au, Cu, Sn, Ti, Ni,...
Oxide : MoO3, NiO, WO3,..
Substrate size Max. 400mm x 400mm
Product yield 22 wafers/run@4inch, 9 wafers/run@6inch, 3 wafers/run@8inch
Substrate rotation 0 to 20 rpm
No of boats 1 to 6 ea
Thermal power 1.5 to 3 kw
Thickness controller Single Q’tz crystal sensor & controller
Ultimate pressure < 5.0E-7 Torr (Cryo pump or TMP)
Option Co-evaporation, Substrate Heating
Control PC control (UPRO software)
Dimension (W*D*H) 1,600mm X 1,450mm X 2,060mm