PRODUCT
2D material CVD
GRABO-H
SPECIFICATIONS
Furnace heater |
GRABO-1H
| 1 zone – 1 number |
|---|---|---|
GRABO-2H | 2 zone – 2 numbers | |
GRABO-3H | 3 zone – 3 numbers | |
Heating element |
Kantal wire, Glass wool molding |
|
Heating zone |
50mm×150mm |
|
Heater temperature |
Max. 1,000℃ |
|
Quartz tube size
|
GRABO-1H | Ø50mm × 1,200mm |
| GRABO-2H | Ø50mm × 1,500mm |
|
| GRABO-3H | Ø50mm × 1,500mm |
|
Gas(MFC)
|
Ar, H2, CH4, O2,..etc |
|
Pump |
Rotary pump |
|
Option |
MO source, TMP |
|
Control |
Manual control or PC |
|