2D material CVD



Application WS2, MoS2, Graphene,…
Substrate size & Load capacity 20mm×20mm & 1sample/run
Process chamber Q’tz tube
Q’tz sheath for profile thermocouple
SUS manifold with double inlet rods for gas inlet and profiling T/C
EP treated SUS flange with water cooling
Heating source Temperature range : Max. 1,000℃
Tungsten-Halogen lamp & lamp heater
SUS heater housing chamber & water cooling
Heater temperature controller
Gas(MFC) Ar, H2, CH4, O2,..etc
Pump Rotary pump
Option MO source, TMP
Control Manual control or PC
System dimension 1,200mm(W)×600(D)×1,250(H)