PRODUCT
ASHER
EURA-C
SPECIFICATIONS
| Process | Ashing, Descum, PR strip, Plasma cleaning,… |
|---|---|
| Substrate Size | 3D material to 1 Cassette type (@ Max. 8inch) |
| Source injection | Shower nozzle |
| Substrate temperature | RT |
| RF power | 2KW @13.56Mhz |
| Ultimate pressure | < 5.0×10-3 Torr |
| Pump | Dry pump or Rotary pump |
| Gas Supply | Ar, O2, CF4,..etc |
| System control | PC control |
| Dimension (w*d*h) | 650mm*750mm*1,600mm |