PRODUCT
Crystal Si solarcell
SOLISO
SPECIFICATIONS
| ITEM | SPECIFICATION |
|---|---|
| Substrate holder capacity | 156mm×156mm 300 wafers |
| Chamber material | Stainless steel |
| Plasma source power | 600W, 13.56MHz (RF) |
| Vauum pump | 33m3/hr, Fomblin oil type |
| Process gas | O2, CF4 gas for process N2 gas for purge |
| System control | Automatic process control by PC |