PRODUCT
Crystal Si solarcell
SOLARC
SPECIFICATIONS
| ITEM | SPECIFICATION |
|---|---|
| Configuration | Load table – Load chamber – Process chamber – Unload chamber – Unload table |
| Tray capacity | 156mm×156mm wafer 9 wafers |
| Load chamber | IR lamp pre-heating unit , 350℃ |
| Process chamber | PE type showerhead Substrate heater , Max. 400℃ |
| Unload chamber | Cooling unit |
| Transport unit | Motor |
| Plasma source power | 3KW , 13.56MHz (RF) |
| Vacuum pump | Load chamber – 500m3/hr Booster + 80m3/hr Rotary pump Process chamber – 600m3/hr Booster + 80m3/hr Dry pump Unload chamber – 500m3/hr Booster + 80m3/hr Rotary pump |
| Process gas | SiH4, NH3, N2 gas for process N2 gas for purge |
| System control | Automatic process control by PC |