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Glovebox+PVD

PRODUCT
INTRODUCTION

Process Data : Perovskite Solarcell

C60 deposition test data

Substrate size : 140mm × 140mm
Process pressure : 5.0E-07Torr

Target Thickness (nm)	Position #1 (nm)	Position #2 (nm)	Position #3 (nm)	Position #4 (nm)	Average thickness (nm)	Thickness Uniformity (± %)
30	30.7	29.74	31.71	29.86	30.5	3.95

BCP deposition test data

Substrate size : 140mm × 140mm
Process pressure : 5.0E-07Torr

Target Thickness (nm)	Position #1 (nm)	Position #2 (nm)	Position #3 (nm)	Position #4 (nm)	Average thickness (nm)	Thickness Uniformity (± %)
30	38	37.25	39.72	36.92	37.97	4.6

PbI2 deposition test data

Process Data

PbI2 → MAI : perovskite deposition test data

Process Data

Perovskite deposition process

PbI2 deposition (dep-rate 0.1Å/sec) + MAI deposition

process

process

process

Element	Wt%	Wt% Sigma	Atomic %
C	23.00	1.94	62.87
N	9.31	4.27	21.81
I	45.89	2.83	11.87
Pb	21.80	2.35	3.45
Total:	100.00		100.00

GlovePV-R

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대표사진

GlovePV-R

GlovePV-S

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대표사진

GlovePV-S

GlovePV-C

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GlovePV-C

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